SPIN RINSE DRYER µSRD

The MOT µSRD is an advanced Spin Rinse Dryersystem developed by M-O-T GmbH. The µSRD is a wet process tool designed for cleaning and drying wafers for all batch applications. The stand-alone MOT µSRD is specially designed for easy operation and maintenance. A single cassette of wafers is placed in a stainless steel rotor. The complete build up of the system is made of plastics(PP white) and guarantees therefore a maximal resistance against chemical attacks either of acids or bases.