ETCHING MODULE µCHEM

The etching unit μChem is a sufficient wet chemical process tool for all wet chemical process steps needed in the MEMS-, Semicon-, Optic- und Solar Industry. Because of the flexible arrangement and build-up, the etching system μChem is the ideal tool either for industrial or R&D demands. The complete buildup of the system is made of plastics (PP white) to guarantees a maximal resistance against chemical attacks either of acids or bases. Following the German law of environmental protection, the system has a level controlled pan, which can be used for secure storing of chemicals or lab tools. Of course, customized solutions are available after clearing the technical details.

ETCHING MODULE µCHEM

Data sheet

Wafer Sizes: up to 300mm

Applications: MEMS, CMOS, Sensor, PV, R&D or Production Type,

ETCHING MODULES

· Batch or Single Wafer Version available

for Cleaning, Etching, Dissolving etc

· Customized Chamber amount and Material Selection

· PLC controlled

· Touch Panel for easy operation

RINSING MODULE

· Standard: Overflow Rinse,

· Optional: QDR, SRD

BUILD-UP

· Material: PP white,

· Door material: PVC transparent,

· PP plumbing, optional PVDF or PFA tube with

PFA Flaretek Fittings

· Access Panel: Touch Panel

OPERATING ELEMENTS

· All process operating elements are integrated into the front panel,

· All electrical and pneumatically components

are integrated in an independent compartment in the back side service area,

· DIW- and N2-Spray gun integrated in the working surface