POROUS SILICON UNIT µPorSi

The porous silicon formation system µPorSi is a sufficient wet chemical solution for porous silicon formation and electropolishing of silicon. Together with our Power Supply PS2, MOT offers an all-in-one solution for this range of fabrication methods. As an option, an optical windows allows for light-assisted porous silicon formation. Because of the flexible arrangement and build-up, the porous silicon formation system μPorSi is the ideal tool either for industrial or R&D demands. Of course, customized solutions are available after clearing the technical details.

POROUS SILICON UNIT µPorSi

Data sheet

Wafer Sizes: up to 300mm

Applications: MEMS, CMOS, Sensor, PV, R&D or Production Type,

ETCHING MODULES

· Overflow circulation with filtration

· Customized Chamber amount selection

· PLC controlled

· Touch Panel for easy operation

RINSING MODULE

· Standard: Overflow Rinse,

· Optional: QDR, Pentane, IPA

BUILD-UP

· Material: PP white,

· Door material: PVC transparent,

· PP plumbing, optional PVDF or PFA tube with

PFA Flaretek Fittings

· Access Panel: Touch Panel

OPERATING ELEMENTS

· All process operating elements are integrated into the front panel,

· All electrical and pneumatically components are integrated in an independent compartment in the back side service area,

· DIW- and N2-Spray gun integrated in the working surface